Two axis state for microscope

A two axis stage for microscopes that is thin, has reduced vibration, and is adapted for increased stage transportation speeds is capable of being disposed inside a chamber without changing a floor-projected area. The XY stage comprises a base 1 , an X table 2 that can be moved in an X direction on...

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Bibliographic Details
Main Authors SEYA EIICHI, NAKAGAWA SHUICHI
Format Patent
LanguageEnglish
Published 13.09.2005
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Summary:A two axis stage for microscopes that is thin, has reduced vibration, and is adapted for increased stage transportation speeds is capable of being disposed inside a chamber without changing a floor-projected area. The XY stage comprises a base 1 , an X table 2 that can be moved in an X direction on the base 1 by an X feed screw 7 , and a Y table 3 that is supported on the X table 2 and movable in a Y direction. A third table 4 is disposed on the base 1 , the third table being movable in the Y direction by a Y-feed screw 8 positioned on the base 1 . Additionally, a slide unit 14 is disposed on the third table 4 , the slide unit 14 being movable in the X direction and connected with the Y table 3.
Bibliography:Application Number: US20040825131