Movable microstructure with contactless stops
A movable microstructure is provided that mitigates stiction. A substrate is provided on which a structural linkage is connected to support a structural film. A hold electrode is connected with the substrate at a position laterally beyond an orthogonal projection of the structural film on the substr...
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| Format | Patent |
| Language | English |
| Published |
21.06.2005
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| Edition | 7 |
| Subjects | |
| Online Access | Get full text |
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| Summary: | A movable microstructure is provided that mitigates stiction. A substrate is provided on which a structural linkage is connected to support a structural film. A hold electrode is connected with the substrate at a position laterally beyond an orthogonal projection of the structural film on the substrate. It is configured to hold the structural film electrostatically in a tilted position with respect to the substrate upon application of a potential difference between the structural film and the hold electrode. Because of its positioning with respect to the structural film, it is ensured that the structural film is not in contact with the substrate when the structural film is being held by the hold electrode. |
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| Bibliography: | Application Number: US20040871466 |