Capacitance probe for surface dielectric constant measurements

• Main Author: BO TIEN-I
• Format: Patent
• Language: English
• Published: 15.02.2005
• Edition: 7
• Subjects: MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; TESTING

A fringing capacitance measurement probe and a method for determining a surface dielectric constant. The fringing capacitance measurement probe includes a planarized surface probe element for making interfacial planar contact with a measurement surface, the planarized surface having a metal conducti...