Capacitance probe for surface dielectric constant measurements

A fringing capacitance measurement probe and a method for determining a surface dielectric constant. The fringing capacitance measurement probe includes a planarized surface probe element for making interfacial planar contact with a measurement surface, the planarized surface having a metal conducti...

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Bibliographic Details
Main Author BO TIEN-I
Format Patent
LanguageEnglish
Published 15.02.2005
Edition7
Subjects
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Summary:A fringing capacitance measurement probe and a method for determining a surface dielectric constant. The fringing capacitance measurement probe includes a planarized surface probe element for making interfacial planar contact with a measurement surface, the planarized surface having a metal conductive line portion and an insulating area portion to form a measuring area. The perimeter portion of the metal conductive line portion has a length greater than the perimeter length of the measuring area such that a fringing capacitance of the measurement surface may be determined.
Bibliography:Application Number: US20020291004