Self-assembled nanobump array stuctures and a method to fabricate such structures
A self-assembled nanobump array structure including a semi-absorbing outer layer provided on at least one nanobump-forming substrate layer, the semi-absorbing outer layer configured to ablate slowly to allow an applied laser energy to be transmitted to the at least one nanobump-forming substrate lay...
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Main Authors | , , , , , |
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Format | Patent |
Language | English |
Published |
08.02.2005
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | A self-assembled nanobump array structure including a semi-absorbing outer layer provided on at least one nanobump-forming substrate layer, the semi-absorbing outer layer configured to ablate slowly to allow an applied laser energy to be transmitted to the at least one nanobump-forming substrate layer, in which the self-assembled nanobump array structure is formed by an energy and a pressure buildup occurring in the at least one nanobump-forming substrate layer. |
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Bibliography: | Application Number: US20030353756 |