Vacuum processing apparatus and method for producing an object to be processed

A vacuum processing apparatus 50 is provided with a bypass line 52 for causing a vacuum transfer chamber 4 and a load-lock chamber 12 to communicate with each other, and a bypass opening and shutting valve 54 for opening and shutting the corresponding bypass line 52, wherein by opening the bypass op...

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Bibliographic Details
Main Authors TAMAGAWA YOSHIHISA, ISHIZAKI HIDEKI, KOSUDA MASANORI
Format Patent
LanguageEnglish
Published 18.01.2005
Edition7
Subjects
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Summary:A vacuum processing apparatus 50 is provided with a bypass line 52 for causing a vacuum transfer chamber 4 and a load-lock chamber 12 to communicate with each other, and a bypass opening and shutting valve 54 for opening and shutting the corresponding bypass line 52, wherein by opening the bypass opening and shutting valve 54, a pressure-reduced state at the vacuum transfer chamber 4 side can be shifted to the load-lock chamber 12 side, and the pressure reduction of the load-lock chamber 12 can be carried out in a short time.
Bibliography:Application Number: US20020230178