Method of forming a ceramic coating on a substrate by electron-beam physical vapor deposition

• Main Authors: PORTE ISABELLE, MALIE ANDRE, SAINT-RAMOND BERTRAND, CHAPUT CHRISTOPHE, DELAGE CYRILLE
• Format: Patent
• Language: English
• Published: 26.10.2004
• Edition: 7
• Subjects: AIR INTAKES FOR JET-PROPULSION PLANTS; ARTIFICIAL STONE; BLASTING; CEMENTS; CERAMICS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; COMBUSTION ENGINES; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS; CONCRETE; CONTROLLING FUEL SUPPLY IN AIR-BREATHING JET-PROPULSION PLANTS; DIFFUSION TREATMENT OF METALLIC MATERIAL; ENGINE PLANTS IN GENERAL; GAS-TURBINE PLANTS; HEATING; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; LIGHTING; LIME, MAGNESIA; MACHINES OR ENGINES IN GENERAL; MECHANICAL ENGINEERING; METALLURGY; NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAMTURBINES; REFRACTORIES; SLAG; STEAM ENGINES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TREATMENT OF NATURAL STONE; WEAPONS

A composite target is placed in a chamber. The target is in the form of a bar made of ceramic powder and it presents composition that is not uniform in the longitudinal direction. At least one substrate is introduced into the chamber in order to have formed thereon a ceramic coating with a composition gradient. The top face of the bar is swept by an electron beam so as to melt the bar material at its top face and form a vapor cloud in the chamber under low pressure. A bar is used that presents a plurality of superposed layers of different compositions, with the composition within each layer being uniform over the entire cross-section of the bar. Each layer of the bar comprises zirconia and at least one oxide selected from the oxides of nickel, cobalt, iron, yttrium, hafnium, cerium, lanthanum, tantalum, niobium, scandium, samarium, gadolinium, dysprosium, ytterbium, and aluminum.