Piezoelectric thin film resonator and frequency variable resonator using the resonator

A piezoelectric thin film resonator which comprises a first electrode, a second electrode, and a piezoelectric film which is interposed between the first electrode and the second electrode, and formed of an epitaxial ferroelectric thin film containing barium titanate, a spontaneous polarization of t...

Full description

Saved in:
Bibliographic Details
Main Authors YASUMOTO TAKAAKI, KAWAKUBO TAKASHI, YANASE NAOKO, SHIMIZU TATSUO, OHARA RYOICHI, ABE KAZUHIDE
Format Patent
LanguageEnglish
Published 08.06.2004
Edition7
Subjects
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
GENERATION OF NOISE BY SUCH CIRCUITS
GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING,BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN ANON-SWITCHING MANNER
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
Online AccessGet full text

Cover

More Information
Summary:A piezoelectric thin film resonator which comprises a first electrode, a second electrode, and a piezoelectric film which is interposed between the first electrode and the second electrode, and formed of an epitaxial ferroelectric thin film containing barium titanate, a spontaneous polarization of the epitaxial ferroelectric thin film being uniaxially orientated in a direction normal to a film surface.
Bibliography:Application Number: US20020235785