Method and apparatus for atomic force microscopy

• Main Authors: GHISLAIN LUCIEN P, ELINGS VIRGIL B
• Format: Patent
• Language: English
• Published: 04.11.2003
• Edition: 7
• Subjects: APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]; MEASURING; PHYSICS; SCANNING-PROBE TECHNIQUES OR APPARATUS; TESTING

A method of scanning probe microscopy includes using a cantilever having a planar body, generally opposed first and second ends, and a tip disposed generally adjacent the second end and extending downwardly towards a surface of a sample. Preferably, the sample is disposed on a support surface. The m...