Method and apparatus for atomic force microscopy

• Main Authors: GHISLAIN LUCIEN P, ELINGS VIRGIL B
• Format: Patent
• Language: English
• Published: 04.11.2003
• Edition: 7
• Subjects: APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]; MEASURING; PHYSICS; SCANNING-PROBE TECHNIQUES OR APPARATUS; TESTING

A method of scanning probe microscopy includes using a cantilever having a planar body, generally opposed first and second ends, and a tip disposed generally adjacent the second end and extending downwardly towards a surface of a sample. Preferably, the sample is disposed on a support surface. The method includes directing a beam of light onto the second end in a direction substantially parallel to the support surface. In operation, the second end directs the beam towards a detector apparatus at a particular angle. Then, the method monitors a change in the angle of deflection of the beam of light caused by deflection of the cantilever as the cantilever tip traverses the surface of the sample, the change being indicative of a characteristic of the surface. Preferably, the second end includes a flat reflective surface, with the flat reflective surface being generally non-planar with respect to the planar body of the cantilever. In addition, the flat reflective surface comprises a mirror fixed to the second end, while in another embodiment, the flat reflective surface is microfabricated integrally with the cantilever.