Irradiation control method and apparatus for pulsed light source used in exposure apparatus
A pulsed light source irradiation control method that irradiates a pulsed beam on an illumination subject includes the steps of measuring the energy of a pulsed beam having a predetermined oscillation frequency emitted from the pulsed light source, determining the actual oscillation frequency of the...
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Main Author | |
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Format | Patent |
Language | English |
Published |
05.08.2003
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | A pulsed light source irradiation control method that irradiates a pulsed beam on an illumination subject includes the steps of measuring the energy of a pulsed beam having a predetermined oscillation frequency emitted from the pulsed light source, determining the actual oscillation frequency of the emitted pulsed beam in accordance with the number of pulses of the pulsed beam, and adjusting the energy of the pulsed beam when the actual oscillation frequency differs from the predetermined oscillation frequency. |
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Bibliography: | Application Number: US20000579740 |