System and method for providing a lithographic light source for a semiconductor manufacturing process
A method for providing a lithographic light source is provided that includes producing a process fluid plume. A coaxial shielding fluid is produced around the process fluid plume. A plasma is generated by providing an energy source that impinges on the process fluid plume.
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
22.04.2003
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | A method for providing a lithographic light source is provided that includes producing a process fluid plume. A coaxial shielding fluid is produced around the process fluid plume. A plasma is generated by providing an energy source that impinges on the process fluid plume. |
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Bibliography: | Application Number: US20010760340 |