Charged particle apparatus

A magnetism preventive cylinder is provided at a focused ion beam irradiating lens barrel tip, and an electricity preventive cylinder is mounted at an electron beam irradiating lens barrel tip. Also, the magnetism preventive cylinder is provided at the electron beam irradiating lens barrel tip in pl...

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Bibliographic Details
Main Author OI MASAMICHI
Format Patent
LanguageEnglish
Published 17.09.2002
Edition7
Subjects
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
SEMICONDUCTOR DEVICES
TESTING
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Abstract A magnetism preventive cylinder is provided at a focused ion beam irradiating lens barrel tip, and an electricity preventive cylinder is mounted at an electron beam irradiating lens barrel tip. Also, the magnetism preventive cylinder is provided at the electron beam irradiating lens barrel tip in place of electricity preventive cylinder. The magnetism preventive cylinder at the focused ion beam irradiating lens barrel tip prevents a focused ion beam from being affected by a magnetic field from a focused ion beam. The electricity preventive cylinder at the electron beam irradiating lens barrel tip prevents against a magnetic field from the electron beam irradiating lens barrel tip.
AbstractList A magnetism preventive cylinder is provided at a focused ion beam irradiating lens barrel tip, and an electricity preventive cylinder is mounted at an electron beam irradiating lens barrel tip. Also, the magnetism preventive cylinder is provided at the electron beam irradiating lens barrel tip in place of electricity preventive cylinder. The magnetism preventive cylinder at the focused ion beam irradiating lens barrel tip prevents a focused ion beam from being affected by a magnetic field from a focused ion beam. The electricity preventive cylinder at the electron beam irradiating lens barrel tip prevents against a magnetic field from the electron beam irradiating lens barrel tip.
Author OI MASAMICHI
Author_xml – fullname: OI MASAMICHI
BookMark eNrjYmDJy89L5WSQcs5ILEpPTVEoSCwqyUzOSVVILAAyE0tKi3kYWNMSc4pTeaE0N4OCm2uIs4duakF-fGpxQWJyal5qSXxosJmJqZGhubGToTERSgDd0SSa
ContentType Patent
DBID EVB
DatabaseName esp@cenet
DatabaseTitleList
Database_xml – sequence: 1
  dbid: EVB
  name: esp@cenet
  url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP
  sourceTypes: Open Access Repository
DeliveryMethod fulltext_linktorsrc
Discipline Medicine
Chemistry
Sciences
Physics
Edition 7
ExternalDocumentID US6452173B1
GroupedDBID EVB
ID FETCH-epo_espacenet_US6452173B13
IEDL.DBID EVB
IngestDate Fri Jul 19 11:49:48 EDT 2024
IsOpenAccess true
IsPeerReviewed false
IsScholarly false
Language English
LinkModel DirectLink
MergedId FETCHMERGED-epo_espacenet_US6452173B13
Notes Application Number: US19990315717
OpenAccessLink https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20020917&DB=EPODOC&CC=US&NR=6452173B1
ParticipantIDs epo_espacenet_US6452173B1
PublicationCentury 2000
PublicationDate 20020917
PublicationDateYYYYMMDD 2002-09-17
PublicationDate_xml – month: 09
  year: 2002
  text: 20020917
  day: 17
PublicationDecade 2000
PublicationYear 2002
RelatedCompanies SEIKO INSTRUMENTS INC
RelatedCompanies_xml – name: SEIKO INSTRUMENTS INC
Score 2.563142
Snippet A magnetism preventive cylinder is provided at a focused ion beam irradiating lens barrel tip, and an electricity preventive cylinder is mounted at an electron...
SourceID epo
SourceType Open Access Repository
SubjectTerms APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
SEMICONDUCTOR DEVICES
TESTING
Title Charged particle apparatus
URI https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20020917&DB=EPODOC&locale=&CC=US&NR=6452173B1
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1LS8NAEB5Kfd40KrY-yEFyC9pms2kPQciLIvSBbaS3kp1spZcaTIp_39klqV70OguzL2a_nZ2dbwAe9MVeDtHmOOA2Y7i2M0Jh2809dHPezxlXicLjCR-l7GXpLluwaXJhNE_olyZHJItCsvdKn9fFzyNWpP9Wlo9iQ6KP52ThR1bjHfcJ_jwrCvx4No2moRWGfjq3Jq--it_1PCcgR-lA3aIVzX78FqiklOI3oiRncDgjZdvqHFpya8BJ2BReM-B4XMe7DTjSHzSxJGFthOUFdFWI_F3mZlFvu5kVmsF7V16CmcSLcGRTd6v91FbpfD8w5wra5PHLazCdzHkSDGUPccDyNRuKNUcUhLxMKIq5DnT-VNP9p-0GTnUxE1UBwbuFdvW5k3eEqZW416vxDbuqesI
link.rule.ids 230,309,786,891,25594,76906
linkProvider European Patent Office
linkToHtml http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1LT4NAEJ409VFvihpbXxwMN6Ity9IeiAlQglpoY8H0RthlMb1UIjT-fXc3UL3odTaZfWX229nZ-QbgTl7s2YTqmI6xjhAt9IyjsG7mFjVzPMoRFonCYYSDBD2vzFUH1m0ujOQJ_ZLkiNyiKLf3Wp7X5c8jlif_Vlb3ZM1FH49-bHta6x2POPxZmufY08Xcm7ua69rJUotebRG_G1qGwx2lPUuQ84qb05sjklLK34jiH8P-givb1CfQYRsFem5beE2Bw7CJdytwID9o0ooLGyOsTmEgQuTvLFfLZtvVrJQM3tvqDFR_GruBzrtLd1NLk-VuYMY5dLnHzy5ANTLjgSDKhpSOUV6gCSkwpYQjLyKCYq4P_T_VDP5pu4VeEIezdPYUvVzCkSxsIqohWFfQrT-37Jrja01u5Mp8A6Effa8
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Charged+particle+apparatus&rft.inventor=OI+MASAMICHI&rft.date=2002-09-17&rft.externalDBID=B1&rft.externalDocID=US6452173B1