Charged particle apparatus

A magnetism preventive cylinder is provided at a focused ion beam irradiating lens barrel tip, and an electricity preventive cylinder is mounted at an electron beam irradiating lens barrel tip. Also, the magnetism preventive cylinder is provided at the electron beam irradiating lens barrel tip in pl...

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Bibliographic Details
Main Author OI MASAMICHI
Format Patent
LanguageEnglish
Published 17.09.2002
Edition7
Subjects
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
SEMICONDUCTOR DEVICES
TESTING
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Summary:A magnetism preventive cylinder is provided at a focused ion beam irradiating lens barrel tip, and an electricity preventive cylinder is mounted at an electron beam irradiating lens barrel tip. Also, the magnetism preventive cylinder is provided at the electron beam irradiating lens barrel tip in place of electricity preventive cylinder. The magnetism preventive cylinder at the focused ion beam irradiating lens barrel tip prevents a focused ion beam from being affected by a magnetic field from a focused ion beam. The electricity preventive cylinder at the electron beam irradiating lens barrel tip prevents against a magnetic field from the electron beam irradiating lens barrel tip.
Bibliography:Application Number: US19990315717