Burn-in test method for a semiconductor chip and burn-in test apparatus therefor

A burn-in test method and apparatus and a semiconductor chip to be used in a burn-in test method that allow current stress to be imposed on every circuit node by varying a power supply voltage in pulse form, and thereby enables an efficient burn-in test. A burn-in test is performed efficiently by im...

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Bibliographic Details
Main Author YAMAMOTO SHIGEHISA
Format Patent
LanguageEnglish
Published 11.06.2002
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Summary:A burn-in test method and apparatus and a semiconductor chip to be used in a burn-in test method that allow current stress to be imposed on every circuit node by varying a power supply voltage in pulse form, and thereby enables an efficient burn-in test. A burn-in test is performed efficiently by imposing current stress to every internal circuit by supplying the internal circuits of a semiconductor chip with a pulse Vcc voltage that varies from 0 V to a burn-in voltage Vbi. The burn-in test time can further be shortened by varying the Vcc voltage in pulse form in a range from a voltage that is higher than or equal to the threshold voltage Vth to the burn-in voltage Vbi or by setting the pulse waveform of the Vcc voltage in such a manner that a high-voltage period TH is longer than a low-voltage period TL.
Bibliography:Application Number: US19990309907