Alarm system for semiconductor device fabrication facility

An alarm system for a semiconductor device fabrication facility for monitoring the current operation state of the facility performing a process, such as ion-implantation, includes a lamp tower which is visibly recognizable from a distance via lighted lamps. The alarm system includes a logical circui...

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Bibliographic Details
Main Author RHEEM BYEONG-KI
Format Patent
LanguageEnglish
Published 04.06.2002
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
CALCULATING
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PHYSICS
SEMICONDUCTOR DEVICES
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Summary:An alarm system for a semiconductor device fabrication facility for monitoring the current operation state of the facility performing a process, such as ion-implantation, includes a lamp tower which is visibly recognizable from a distance via lighted lamps. The alarm system includes a logical circuit for executing logical-combination based on at least one input signal indicating respective operation states of the facility; and a driver which outputs at least one driving signal for driving a lamp based on the result from the logical circuit. The number of the lamps is identical to the number of driving signals output from the driver based on a one-to-one correspondence, and each of the lamps indicates a particular result for the respective operation states of the facility.
Bibliography:Application Number: US19980228036