Light modulating device

The present invention relates to microfabricated spectrometers including methods of making and using same. Microspectrometers can be formed in a single chip in which detectors and light sources can be monolithically integrated. The microspectrometer can be integrated into a sensor system to measure...

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Bibliographic Details
Main Author ZAVRACKY PAUL M
Format Patent
LanguageEnglish
Published 30.04.2002
Edition7
Subjects
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Summary:The present invention relates to microfabricated spectrometers including methods of making and using same. Microspectrometers can be formed in a single chip in which detectors and light sources can be monolithically integrated. The microspectrometer can be integrated into a sensor system to measure the optical and physical properties of solids and fluids.
Bibliography:Application Number: US20000626678