Light modulating device
The present invention relates to microfabricated spectrometers including methods of making and using same. Microspectrometers can be formed in a single chip in which detectors and light sources can be monolithically integrated. The microspectrometer can be integrated into a sensor system to measure...
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Main Author | |
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Format | Patent |
Language | English |
Published |
30.04.2002
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | The present invention relates to microfabricated spectrometers including methods of making and using same. Microspectrometers can be formed in a single chip in which detectors and light sources can be monolithically integrated. The microspectrometer can be integrated into a sensor system to measure the optical and physical properties of solids and fluids. |
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Bibliography: | Application Number: US20000626678 |