Active vibration isolation device and its control method

• Main Author: WAKUI SHINJI
• Format: Patent
• Language: English
• Published: 30.04.2002
• Edition: 7
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BLASTING; CINEMATOGRAPHY; ELECTROGRAPHY; ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; HEATING; HOLOGRAPHY; LIGHTING; MATERIALS THEREFOR; MEANS FOR DAMPING VIBRATION; MECHANICAL ENGINEERING; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SHOCK-ABSORBERS; SPRINGS; THERMAL INSULATION IN GENERAL; WEAPONS

A hybrid active vibration isolation device has an intermediate plate inserted between a vibration damping subject and a setting surface on which the vibration damping subject is set, and laminated rubber and electromagnetic motors are interposed between the vibration damping subject and intermediate plate. A piezoelectric element is interposed between the intermediate plate and setting surface. In order to detect vibrations of the vibration damping subject, intermediate plate, and setting surface, velocity sensors are provided to them. The active vibration isolation device has a feedback mechanism for controlling the electromagnetic motors on the basis of signals from the velocity sensors provided to the vibration damping subject and setting surface, and controlling the piezoelectric element on the basis of a signal from the velocity sensor set on the intermediate plate.