Micromachined fluid ejector systems and methods

An electrostatic microelectromechanical system (MEMS) based fluid ejector comprises a movable piston structure and a stationary faceplate. A fluid chamber is defined between the piston structure and a substrate. The piston structure 110 may be resiliently mounted on the substrate by one or more spri...

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Bibliographic Details
Main Authors GALAMBOS PAUL C, GOORAY ARTHUR M, ROLLER GEORGE J, CROWLEY JOSEPH M, GIVLER RICHARD C, PETER FRANK J, ZAVADIL KEVIN R
Format Patent
LanguageEnglish
Published 09.04.2002
Edition7
Subjects
CORRECTION OF TYPOGRAPHICAL ERRORS
i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME
LINING MACHINES
PERFORMING OPERATIONS
PRINTING
SELECTIVE PRINTING MECHANISMS
STAMPS
TRANSPORTING
TYPEWRITERS
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Summary:An electrostatic microelectromechanical system (MEMS) based fluid ejector comprises a movable piston structure and a stationary faceplate. A fluid chamber is defined between the piston structure and a substrate. The piston structure 110 may be resiliently mounted on the substrate by one or more spring elements. A fluid to be ejected is supplied in the fluid chamber from a fluid reservoir through a fluid refill hole formed in the substrate. The faceplate includes a nozzle hole through which a fluid jet or drop is ejected. In various exemplary embodiments, the piston structure moves towards the faceplate by electrostatic attraction between the piston structure and the faceplate. As a result of the movement of the piston structure, a portion of the fluid between the piston structure and the faceplate is forced out of the nozzle hole, forming a jet or drop of the fluid.
Bibliography:Application Number: US20000722331