Mass filtering sputtered ion source

A device and method for separating ions uses electric and magnetic fields that are specifically configured and oriented in a vacuum chamber. Also, a central electrode that is made of the materials whose ions are to be separated is positioned in the chamber. Magnetic coils mounted on the chamber gene...

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Bibliographic Details
Main Authors VOLOSOV VADIM, PUTVINSKI SERGEI
Format Patent
LanguageEnglish
Published 04.12.2001
Edition7
Subjects
GAMMA RAY OR X-RAY MICROSCOPES
IRRADIATION DEVICES
NUCLEAR ENGINEERING
NUCLEAR PHYSICS
PHYSICS
TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR
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Summary:A device and method for separating ions uses electric and magnetic fields that are specifically configured and oriented in a vacuum chamber. Also, a central electrode that is made of the materials whose ions are to be separated is positioned in the chamber. Magnetic coils mounted on the chamber generate a magnetic field, B, that is oriented parallel to the central electrode and is configured with a disk-shaped magnetic mirror at one end of the chamber, and an annular-shaped magnetic mirror at the other end. A plurality of electrodes generate an electric field, E, that is oriented perpendicular to the central electrode. In operation, neutral atoms in the chamber are ionized by the electric field. The electric field, however, is specifically configured to confine relatively lighter mass ions in the chamber. These ions are then subsequently removed from the chamber through the opening in the annular-shaped magnetic mirror. Simultaneously, the electric field directs the heavier mass ions into contact with the central electrode, to thereby sputter the electrode and generate additional neutral atoms for ionization in a sustained operation.
Bibliography:Application Number: US20000630847