Apparatus and method for laser scribing a coated substrate
Apparatus (20) and a method for laser scribing a coated substrate (22) utilizes a rotating polygonal mirror (36) to split a pulsed laser beam (30) in order to provide spaced ablations (34) in a coating (26) on the substrate. The laser pulses are directed through at least one lens (56, 60) and may be...
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Main Author | |
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Format | Patent |
Language | English |
Published |
09.10.2001
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | Apparatus (20) and a method for laser scribing a coated substrate (22) utilizes a rotating polygonal mirror (36) to split a pulsed laser beam (30) in order to provide spaced ablations (34) in a coating (26) on the substrate. The laser pulses are directed through at least one lens (56, 60) and may be passed through fiber optics (62). A laser detector (68) may be used to detect the rotational position of the rotating polygonal mirror (36). A controller (76'', 76''') allows a second set of scribes to be generated with reference to the first set of scribes. |
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Bibliography: | Application Number: US19990457062 |