Apparatus and method for laser scribing a coated substrate

Apparatus (20) and a method for laser scribing a coated substrate (22) utilizes a rotating polygonal mirror (36) to split a pulsed laser beam (30) in order to provide spaced ablations (34) in a coating (26) on the substrate. The laser pulses are directed through at least one lens (56, 60) and may be...

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Bibliographic Details
Main Author POWELL RICKY C
Format Patent
LanguageEnglish
Published 09.10.2001
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
CLADDING OR PLATING BY SOLDERING OR WELDING
CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MACHINE TOOLS
METAL-WORKING NOT OTHERWISE PROVIDED FOR
PERFORMING OPERATIONS
SEMICONDUCTOR DEVICES
SOLDERING OR UNSOLDERING
TRANSPORTING
WELDING
WORKING BY LASER BEAM
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Summary:Apparatus (20) and a method for laser scribing a coated substrate (22) utilizes a rotating polygonal mirror (36) to split a pulsed laser beam (30) in order to provide spaced ablations (34) in a coating (26) on the substrate. The laser pulses are directed through at least one lens (56, 60) and may be passed through fiber optics (62). A laser detector (68) may be used to detect the rotational position of the rotating polygonal mirror (36). A controller (76'', 76''') allows a second set of scribes to be generated with reference to the first set of scribes.
Bibliography:Application Number: US19990457062