Charged-particle source, control system and process using gating to extract the charged particle beam

A control system and process for operating a charged-particle source which achieves gating of the charged-particle beam without a mechanical shutter and with very short transition between the beam "on" and beam "off" states is presented. The process and control system provide ver...

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Main Authors JACOB JOHN, KANAROV VICTOR, OSTAN EDWARD W, NAVY ABRAHAM J, FREMGEN, JR. ROGER P, HAYES ALAN V, LAKIOS EMMANUEL N, TREYGER GENRIKH
Format Patent
LanguageEnglish
Published 01.05.2001
Edition7
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Summary:A control system and process for operating a charged-particle source which achieves gating of the charged-particle beam without a mechanical shutter and with very short transition between the beam "on" and beam "off" states is presented. The process and control system provide very precise control of the duration of the charged-particle extraction.
Bibliography:Application Number: US19990371061