Liquid crystal display device with reduced source/drain parasitic capacitance and method of fabricating same

• Main Author: LYU KI-HYUN
• Format: Patent
• Language: English
• Published: 17.04.2001
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; SEMICONDUCTOR DEVICES; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

A liquid crystal display device having a plurality of data lines and a plurality of gate lines arranged perpendicular to each other and a plurality of thin film transistors and pixel electrodes formed for respective pixels includes a substrate and a gate electrode on the substrate. A first insulating layer is formed on the substrate and the gate electrode. An active layer is formed on the first insulating layer and an etch stop layer is formed on the active layer over the gate electrode. A silicide layer having first and second sides relative to the second insulating layer is formed on the surface of the active layer and a metal electrode is formed on the first side of the silicide layer. A pixel electrode is formed on the second side of the silicide layer and a third insulating layer is formed having a portion directly on the silicide layer.