Charged-particle source, control system, and process using gating to extract the ion beam

A control system and process for operating a charged-particle source which achieves gating of the charged-particle beam without a mechanical shutter and with very short transition between the beam "on" and beam "off" states is presented. The process and control system provide ver...

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Main Authors LAKIOS; EMMANUEL N, NAVY; ABRAHAM J, FREMGEN, JR.; ROGER P, KANAROV; VICTOR, TREYGER; GENRIKH, OSTAN; EDWARD W, HAYES; ALAN V, JACOB; JOHN
Format Patent
LanguageEnglish
Published 09.11.1999
Edition6
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Summary:A control system and process for operating a charged-particle source which achieves gating of the charged-particle beam without a mechanical shutter and with very short transition between the beam "on" and beam "off" states is presented. The process and control system provide very precise control of the duration of the charged-particle extraction.
Bibliography:Application Number: US19970883696