Valved coupling for ultra high purtiy gas distribution system
Valved couplers and gas processing components particularly suitable for ultra-high purity gas distribution for use in semiconductor manufacturing. In the couplers, a valve stem/bullnose seals the aperture of the coupler immediately adjacent the exterior of the coupler, so that only a minimal amount...
Saved in:
Main Authors | , , , |
---|---|
Format | Patent |
Language | English |
Published |
26.01.1999
|
Edition | 6 |
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | Valved couplers and gas processing components particularly suitable for ultra-high purity gas distribution for use in semiconductor manufacturing. In the couplers, a valve stem/bullnose seals the aperture of the coupler immediately adjacent the exterior of the coupler, so that only a minimal amount of the wetted surface of the coupler is exposed to the external environment. A gas processing component (e.g., a filter), or an entire integrated gas stick assembly, may be sealed from the exterior environment at both its inlet and outlet sides, by these valved couplers. As a result, the entire device can be purged after manufacture and left in a controlled environment during shipment and installation, reducing the need for purging after installation. |
---|---|
Bibliography: | Application Number: US19970923476 |