Method for fabricating capacitors of a dynamic random access memory
A method for fabricating capacitors of a DRAM by employing liquid-phase deposition. Since the working temperature required for performing liquid-phase deposition is low, the deposition process can be performed in the presence of the photoresist. This method comprises: filling the contact hole and co...
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Main Author | |
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Format | Patent |
Language | English |
Published |
19.01.1999
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Edition | 6 |
Subjects | |
Online Access | Get full text |
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