Semiconductor body with a substrate glued to a support body

A semiconductor device comprises a substrate (1) with a plane surface (4) on which a layer structure (2) is formed in a number of layers (5, 7, 9, 13, 15, 17). The side of the substrate on which the layer structure was formed is fastened to a plane support body (18) by means of a glue layer (19) whi...

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Bibliographic Details
Main Authors VAN DEN EINDEN; WILHELMUS T. A. J, DEKKER; RONALD, MAAS; HENRICUS G. R, MICHIELSEN; THEODORUS M
Format Patent
LanguageEnglish
Published 27.10.1998
Edition6
Subjects
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