Thin film transistor device, display device and method of fabricating the same
A method of fabricating a thin film transistor by setting the temperature of a heat treatment for crystallizing an active layer which is formed on a substrate at a level not deforming the substrate and activating an impurity layer in a heat treatment method different from that employed for the heat...
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Main Authors | , , , , |
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Format | Patent |
Language | English |
Published |
23.06.1998
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Edition | 6 |
Subjects | |
Online Access | Get full text |
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Summary: | A method of fabricating a thin film transistor by setting the temperature of a heat treatment for crystallizing an active layer which is formed on a substrate at a level not deforming the substrate and activating an impurity layer in a heat treatment method different from that employed for the heat treatment, and a semiconductor device prepared by forming a heat absorption film, a semiconductor film, a gate insulating film, and a gate electrode on a substrate, the heat absorption film being provided within a region substantially corresponding to the semiconductor film. |
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Bibliography: | Application Number: US19960677424 |