High temperature electromigration stress test system, test socket, and use thereof
A test socket is provided as part of a high temperature electromigration test system to allow the prediction of median time to failure to temperatures in excess of 450 DEG C. of VSLI interconnects.
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Main Authors | , , , , |
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Format | Patent |
Language | English |
Published |
02.06.1998
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Edition | 6 |
Subjects | |
Online Access | Get full text |
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Summary: | A test socket is provided as part of a high temperature electromigration test system to allow the prediction of median time to failure to temperatures in excess of 450 DEG C. of VSLI interconnects. |
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Bibliography: | Application Number: US19960715942 |