Micropositioning devices, using single-crystal piezoelectric bodies, having at least two spatial degrees of freedom

• Main Author: KLEIMAN; RAFAEL NATHAN
• Format: Patent
• Language: English
• Published: 14.04.1998
• Edition: 6
• Subjects: ELECTRICITY

A piezoelectric micropositioning device includes, in one embodiment, four single-crystal piezoelectric bodies cut in the form of single-crystal parallel slabs from a single larger single crystal. Each of the single-crystal slabs has a separate electrode attached to an opposing major surface. One of the end faces of each of the slabs is fixed to a substrate; the other of the end faces is fixed to a holder. In response to voltages applied to the electrodes, the holder can be moved in two or three linearly independent directions, depending upon the applied voltages. In another embodiment, only a single piezoelectric body, preferably in the shape of a column and in conjunction with at least four electrodes located on the side surfaces of the column, is required for such motion in two or three directions.