Reversing orientation of sputtering screen to avoid contamination
A sputtering apparatus deposits a layer of material on a substrate. The apparatus includes a screening member, such as a plate collimator or a tube collimator, located between the target and substrate. A motor drive reverses the respective positions of the two opposite sides of the screening device...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
14.05.1996
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Edition | 6 |
Subjects | |
Online Access | Get full text |
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Summary: | A sputtering apparatus deposits a layer of material on a substrate. The apparatus includes a screening member, such as a plate collimator or a tube collimator, located between the target and substrate. A motor drive reverses the respective positions of the two opposite sides of the screening device which respectively face the substrate and the target. |
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Bibliography: | Application Number: US19940357695 |