Micromachined microaccelerometer for measuring acceleration along three axes

The present invention relates to a microaccelerometer employing a single free-mass and capable of measuring acceleration along three coordinate axes, and a process for fabricating through micromachining and microelectronic techniques a microaccelerometer employing a free-mass. A microaccelerometer p...

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Bibliographic Details
Main Author LANE; RICHARD L
Format Patent
LanguageEnglish
Published 25.10.1994
Edition5
Subjects
INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
MEASURING
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK
PHYSICS
TESTING
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Summary:The present invention relates to a microaccelerometer employing a single free-mass and capable of measuring acceleration along three coordinate axes, and a process for fabricating through micromachining and microelectronic techniques a microaccelerometer employing a free-mass. A microaccelerometer preform is constructed by chemically coating and etching a silicon wafer to form a support member and a free-mass surrounded by the member. The free-mass is movable with respect to, but constrained by the silicon support member. Acceleration measurements are obtained by circuits which sense changes in the position of the free-mass with respect to an equilibrium position, induced by a change in the rate of acceleration of the accelerometer, and the electromagnetic force required to restore the free-mass to its equilibrium position.
Bibliography:Application Number: US19920866667