High energy beam sensitive glasses

The invention relates to a high energy beam-sensitive glass (HEBS glass) exhibiting insensitivity and/or inertness to actinic radiation. Silver ion exchange in acidic aqueous solution results in a slab waveguide having a constant refractive index in the thickness dimension. Low loss single mode as w...

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Bibliographic Details
Main Author WU; CHE-KUANG
Format Patent
LanguageEnglish
Published 08.02.1994
Edition5
Subjects
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Summary:The invention relates to a high energy beam-sensitive glass (HEBS glass) exhibiting insensitivity and/or inertness to actinic radiation. Silver ion exchange in acidic aqueous solution results in a slab waveguide having a constant refractive index in the thickness dimension. Low loss single mode as well as multimode waveguides were fabricated with a great precision in the designed thickness and step index (Delta)n. Channel waveguides were patterned and fabricated in one process step within a HEBS glass via a lithographic printing method using a high energy beam. Alternatively, predesigned pattern of channel waveguides were fabricated instantaneously upon direct write with a laser beam pattern generator employing a focused laser beam, within a HEBS glass which has been flood exposed to a high energy beam. The product of the present invention is also suitable for use as a phototool in photolithographic processes, as a glass filter for spatial modulation of light intensity and/or color, as a laser beam direct write recording and archival storage medium, and as a carrier plate of color filters and black matrix of a flat panel display.
Bibliography:Application Number: US19920906277