CLAMPING SYSTEM FOR AN ANNULAR-SAW BLADE AND ITS USE IN THE SAWING OF BARS, IN PARTICULAR OF SEMICONDUCTOR MATERIAL, INTO WAFERS

• Main Author: MALCOK; HANIFI
• Format: Patent
• Language: English
• Published: 17.08.1993
• Subjects: BROACHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; FILING; GRINDING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOTOTHERWISE PROVIDED FOR; MACHINE TOOLS; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; PLANING; POLISHING; SAWING; SCRAPING; SHEARING; SLOTTING; TOOLS FOR GRINDING, BUFFING, OR SHARPENING; TRANSPORTING; WORKING CEMENT, CLAY, OR STONE; WORKING STONE OR STONE-LIKE MATERIALS

In the annular sawing of bars, in particular of semiconductor material, the accurate fitting of the saw blade is of great importance. In the case of the conventional clamping systems, in which the saw blade is held on the machine rotary part by clamping forces exerted by means of a holding ring and is subjected to tension by means of an additional clamping ring, inadequate tensioning constancy is usually caused by the tensioning forces acting against the clamping forces. A tensioning behavior which is better in comparison can be achieved according to the invention by the tensioning forces being applied to the clamping ring by clamping elements releasably connected to the machine rotary part and consequently clamping forces and tensioning forces no longer being directed against one another. By the use of such clamping systems, longer saw blade service lives and higher sawing outputs can be achieved.