Flow-control type piezoelectric element valve

• Main Authors: MIYO; YASUHIKO, KAWASAKI; KOZO, HIRATSUKA; HAJIME
• Format: Patent
• Language: English
• Published: 09.07.1991
• Subjects: ACTUATING-FLOATS; BLASTING; COCKS; DEVICES FOR VENTING OR AERATING; ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; HEATING; LIGHTING; MECHANICAL ENGINEERING; TAPS; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; THERMAL INSULATION IN GENERAL; VALVES; WEAPONS

A flow-control type piezoelectric element valve simplifies calibration of the gas flow rate, permits stable control of the gas flow rate and facilitates to supply a gas at stable flow rate. A gap is produced between a valve seat and a sealing portion comprising a sheet arranged on the top of the valve seat and a piezoelectric element, by applying from a current installation element to the piezoelectric element. Then a gas is introduced into a gas channel within the valve seat through the gap, pressure of the gas flowing along the gas channel is detected by means of a pressure sensor mounted near the outlet of the gas channel. According to correlation between pressure and gas flow rate in the output characteristics on the pressure sensor, the flow rate at the time when a gas flows along the gas channel can be accurately and easily calculated.