Gas detecting device

A gas detecting device includes a substrate and a plurality of overhang portions made from an electric insulation material and disposed in a space over the substrate. A gas sensitive film is made from a metallic oxide semiconductor material and is mounted on each of the overhang portions. A pair of...

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Bibliographic Details
Main Authors YAGAWARA; SHINJI, OHTA; WASABURO
Format Patent
LanguageEnglish
Published 07.05.1991
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:A gas detecting device includes a substrate and a plurality of overhang portions made from an electric insulation material and disposed in a space over the substrate. A gas sensitive film is made from a metallic oxide semiconductor material and is mounted on each of the overhang portions. A pair of detecting leads is connected to the gas sensitive film. A heater lead for heating the gas sensitive film is mounted on each of the overhang portions. The gas sensitive film of at least one of the plurality of overhang portions has a composition ratio of metal to oxygen different from that of the other gas sensitive films whereby a specified gas can be selectively detected on the basis of the response of the plurality of metallic oxide semiconductors to the gas.
Bibliography:Application Number: US19890434255