Scanning apparatus for a scanning microscope

A scanning apparatus for scanning which is used in a scanning microscope having an observation apparatus for observing a sample wherein the sample is secured in order to obtain an image of the same. The scanning apparatus includes a moving apparatus for moving at least either the sample or the obser...

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Bibliographic Details
Main Authors KARAKI; KOICHI, SAKAI; MITSUGU, SASAKI; YASUO
Format Patent
LanguageEnglish
Published 05.02.1991
Subjects
ACOUSTICS
ACOUSTICS NOT OTHERWISE PROVIDED FOR
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING,NOISE OR OTHER ACOUSTIC WAVES IN GENERAL
MUSICAL INSTRUMENTS
PHYSICS
SOUND-PRODUCING DEVICES
TESTING
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Summary:A scanning apparatus for scanning which is used in a scanning microscope having an observation apparatus for observing a sample wherein the sample is secured in order to obtain an image of the same. The scanning apparatus includes a moving apparatus for moving at least either the sample or the observation apparatus in order to scan the sample, and a vibration attenuating element structurally provided for the moving apparatus for attenuating relative vibration between the sample and the observation.
Bibliography:Application Number: US19900564655