Scanning apparatus for a scanning microscope

A scanning apparatus for scanning which is used in a scanning microscope having an observation apparatus for observing a sample wherein the sample is secured in order to obtain an image of the same. The scanning apparatus includes a moving apparatus for moving at least either the sample or the obser...

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Bibliographic Details
Main Authors KARAKI; KOICHI, SAKAI; MITSUGU, SASAKI; YASUO
Format Patent
LanguageEnglish
Published 05.02.1991
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Summary:A scanning apparatus for scanning which is used in a scanning microscope having an observation apparatus for observing a sample wherein the sample is secured in order to obtain an image of the same. The scanning apparatus includes a moving apparatus for moving at least either the sample or the observation apparatus in order to scan the sample, and a vibration attenuating element structurally provided for the moving apparatus for attenuating relative vibration between the sample and the observation.
Bibliography:Application Number: US19900564655