High-purity metal and metal silicide target for LSI electrodes

There is provided a high-purity molybdenum target or high-purity molybdenum silicide target for LSI electrodes which comprises a high-purity metallic molybdenum having an alkali metal content of not more than 100 ppb and a radioactive element content of not more than 10 ppb. Further, a process is pr...

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Main Authors KUROKI; MASAMI, KYONO; IWAO, MORI; NOBUYUKI, KATOH; YOSHIHARU, MIYAZAKI; HIDEO, OIKAWA; HIDEO, AMAZAWA; TAKAO, HONNA; NAKAHACHIRO
Format Patent
LanguageEnglish
Published 13.09.1988
Edition4
Subjects
BASIC ELECTRIC ELEMENTS
CHEMISTRY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FERROUS OR NON-FERROUS ALLOYS
METALLURGY
PRETREATMENT OF RAW MATERIALS
PRODUCTION AND REFINING OF METALS
SEMICONDUCTOR DEVICES
TREATMENT OF ALLOYS OR NON-FERROUS METALS
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Summary:There is provided a high-purity molybdenum target or high-purity molybdenum silicide target for LSI electrodes which comprises a high-purity metallic molybdenum having an alkali metal content of not more than 100 ppb and a radioactive element content of not more than 10 ppb. Further, a process is provided for producing such target comprising a wet purification processing followed by a series of dry processings.
Bibliography:Application Number: US19860877559