Method of fabricating image sensor arrays

• Main Author: ARAGHI; MEHDI N
• Format: Patent
• Language: English
• Published: 05.08.1986
• Edition: 4
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; SEMICONDUCTOR DEVICES; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

A sensor array for butting against other like arrays to form a full width array. The active surface of the array chip is first etched to form a V-shaped groove defining an array end; then a parallel groove is cut in the opposite inactive surface with a centerline parallel to but offset from the centerline of the V-shaped groove by an amount sufficient to allow extension of the wafer (111) crystalline plane from the V-shaped groove to the cut groove; then the water is supported in cantilever fashion along an edge substantially coplanar with the V-shaped groove and a downward force is applied to the wafer free end to cause the wafer to fracture along the (111) crystalline plane thereby cleaving the chip from the wafer and providing a uniformly smooth and straight array end for butting against the end of a like array.