Ultra-precision two-dimensional moving apparatus

• Main Author: MORIYAMA; SHIGEO
• Format: Patent
• Language: English
• Published: 18.03.1986
• Edition: 4
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; CONTROLLING; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES; MATERIALS THEREFOR; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; NANOTECHNOLOGY; ORIGINALS THEREFOR; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; REGULATING; SEMICONDUCTOR DEVICES; SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES; TESTING; TRANSPORTING

An ultra-precision two-dimensional moving apparatus is disclosed, in which a fine-moving table is two-dimensionally movably held on a coarse-moving carriage. This fine-moving table is driven finely in X, Y and theta directions by three piezoelectric element actuators. The fine-table position is measured by a laser interferometric measurement system. In response to the error signal between the measured position and a desired position, the piezoelectric element actuators are driven by closed loop control.