Large scale integrated circuit production

• Main Author: HANTUSCH; GERALD H
• Format: Patent
• Language: English
• Published: 01.09.1981
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; SEMICONDUCTOR DEVICES; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS

A method of forming connection networks for an integrated circuit device, by forming an orthogonal array of grooves in a substrate, with the grooves of one array deeper than those of the other array; and by providing conductive strips at the bottoms of the grooves and at selected regions of the groove side walls which strips serve to provide a desired pattern of interconnections.