Diffusion furnace microcontroller

An automatic microprocessor-based control system for a diffusion furnace in which the controller is dedicated to a single associated diffusion tube to provide all monitoring and control functions necessary for a variety of diffusion processes. The controller provides direct digital control of time,...

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Bibliographic Details
Main Authors BECK; MARTIN A, LANDIS; DONALD G, FABRICIUS; JOHN H
Format Patent
LanguageEnglish
Published 30.06.1981
Subjects
CALCULATING
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
PHYSICS
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Summary:An automatic microprocessor-based control system for a diffusion furnace in which the controller is dedicated to a single associated diffusion tube to provide all monitoring and control functions necessary for a variety of diffusion processes. The controller provides direct digital control of time, temperature and gas flow, and can be readily operated with a variety of control algorithms.
Bibliography:Application Number: US19790089631