METHOD FOR FORMING STRIPS ON SEMICONDUCTOR DEVICE

A method for forming a plurality of metal strips on a semiconductor device comprising forming a metallic layer on a surface of semiconductor base, coating a photo sensitive resin layer on the said surface of the metallic layer, forming at least one pattern corresponding to at least one metal strip o...

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Bibliographic Details
Main Authors KASE H,JA, NISHINO Y,JA, MASUDA N,JA
Format Patent
LanguageEnglish
Published 13.11.1973
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A method for forming a plurality of metal strips on a semiconductor device comprising forming a metallic layer on a surface of semiconductor base, coating a photo sensitive resin layer on the said surface of the metallic layer, forming at least one pattern corresponding to at least one metal strip on the sensitized resin layer and etching the metallic layer with an etching solution which oxidizes the semiconductor base.
Bibliography:Application Number: USD3772100