METHOD AND APPARATUS FOR MEASURING THE THICKNESS OF FILMS BY MEANS OF ELLIPTICAL POLARIZATION OF REFLECTED INFRARED RADIATION

• Main Authors: CHARLIE E. JONES JR, ALBERT R. HILTON
• Format: Patent
• Language: English
• Published: 04.02.1969
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING