MULTI-SIZED SUBSTRATE FIXTURE

Various examples include a multi-sized substrate fixture configured to receive and secure various sizes of substrates readily. For example, in various embodiments, the disclosed subject-matter describes a mechanism that readily can be adjusted alternately to receive and secure (e.g., affix) various...

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Bibliographic Details
Main Author Palm, Troy
Format Patent
LanguageEnglish
Published 22.05.2025
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:Various examples include a multi-sized substrate fixture configured to receive and secure various sizes of substrates readily. For example, in various embodiments, the disclosed subject-matter describes a mechanism that readily can be adjusted alternately to receive and secure (e.g., affix) various sizes of substrates, such as a 200 mm wafer and a 300 mm wafer. Other apparatuses and devices are also disclosed.
Bibliography:Application Number: US202318865780