METHODS OF FABRICATING A SI BJT, AND CORRESPONDING DEVICES

• Main Authors: Donkers, Johannes Josephus Theodorus Marinus, Huang, Chih Fan
• Format: Patent
• Language: English
• Published: 03.10.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A method of manufacturing a Si BJT device is disclosed comprising prior processing steps; formation of a protective oxide layer over an active area of the Si BJT device; deposition of a dielectric layer, and a layer stack comprising SiGe, on the protective oxide; etching the dielectric layer, and th...