WINDOW DEPOSITION APPARATUS

A window deposition apparatus includes a chamber, a seating part disposed in the chamber and on which a window is disposed and in which an open portion that exposes a portion of the window is formed, and a spray part disposed in the chamber and that faces a bottom surface of the seating part. An inn...

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Bibliographic Details
Main Authors BAEK, WON-JONG, JOO, JONGSEOK, KIM, SUNGWOO, KIM, JAEHONG, CHOI, SEONGSIK, LEE, CHAEKYEONG
Format Patent
LanguageEnglish
Published 19.09.2024
Subjects
APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
ATOMISING APPARATUS
NOZZLES
PERFORMING OPERATIONS
SPRAYING APPARATUS
SPRAYING OR ATOMISING IN GENERAL
TRANSPORTING
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Summary:A window deposition apparatus includes a chamber, a seating part disposed in the chamber and on which a window is disposed and in which an open portion that exposes a portion of the window is formed, and a spray part disposed in the chamber and that faces a bottom surface of the seating part. An inner surface of the seating part that defines the open portion includes a first inner surface, an inducing surface that connects the first inner surface and the bottom surface of the seating part to each other, a second inner surface disposed on the first inner surface, and a guide surface that connects the second inner surface and a top surface of the seating part to each other. The first inner surface protrudes inward from the second inner surface.
Bibliography:Application Number: US202318393624