APPARATUS FOR PROVIDING RF POWER AND OPERATING METHOD THEREOF

An apparatus for providing radio frequency (RF) power includes a load having a process chamber, a RF power generator configured to provide the RF power through a cable electrically connected to the load, and a reflected power controller configured to detect reflected power from the load in a deliver...

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Bibliographic Details
Main Authors Kim, Sungyeol, Shim, Seungbo, Koh, Siyoung, Kim, Namkyun, Jin, Hadong, Lim, Sungyong
Format Patent
LanguageEnglish
Published 12.09.2024
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Summary:An apparatus for providing radio frequency (RF) power includes a load having a process chamber, a RF power generator configured to provide the RF power through a cable electrically connected to the load, and a reflected power controller configured to detect reflected power from the load in a delivery mode and configured to control the RF power according to the reflected power that was detected.
Bibliography:Application Number: US202318344307