MEMS MICROPHONE
A microelectromechanical (MEMS) transducer includes a substrate, a moveable electrode supported by the substrate, and a pair of fixed electrodes supported by the substrate, each fixed electrode of the pair of fixed electrodes being configured as a bias or sense electrode. The pair of fixed electrode...
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Main Authors | , , , , , , , |
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Format | Patent |
Language | English |
Published |
22.08.2024
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Subjects | |
Online Access | Get full text |
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Summary: | A microelectromechanical (MEMS) transducer includes a substrate, a moveable electrode supported by the substrate, and a pair of fixed electrodes supported by the substrate, each fixed electrode of the pair of fixed electrodes being configured as a bias or sense electrode. The pair of fixed electrodes are disposed in a stacked arrangement. An end of the moveable electrode is configured for vibrational movement along the stacked arrangement during excitation of the moveable electrode. The pair of fixed electrodes are laterally spaced apart from the end of the moveable electrode to establish a capacitance indicative of the vibrational movement. |
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Bibliography: | Application Number: US202218570564 |