CALIBRATION METHOD AND MEASUREMENT SYSTEM

A calibration method including: a first imaging step of imaging a calibration jig, a second imaging step of imaging the calibration jig after causing the calibration jig to be moved in a predetermined first direction, a third imaging step of imaging the calibration jig after causing the calibration...

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Bibliographic Details
Main Author TANAKA, Ryosuke
Format Patent
LanguageEnglish
Published 22.08.2024
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Summary:A calibration method including: a first imaging step of imaging a calibration jig, a second imaging step of imaging the calibration jig after causing the calibration jig to be moved in a predetermined first direction, a third imaging step of imaging the calibration jig after causing the calibration jig to be moved in a predetermined second direction, a fourth imaging step of imaging the calibration jig, a fifth imaging step of imaging the calibration jig after rotating the calibration jig about an axis oriented in a predetermined third direction, a sixth imaging step of imaging the calibration jig after rotating the calibration jig about an axis oriented in a predetermined fourth direction, and identifying calibration parameters used for calibration of the measurement apparatus.
Bibliography:Application Number: US202418435347